TL1200-SC pre-heated sliding rod CVD system
The front end of this CVD system is equipped with a pre-heater that can be heated to 1000 ° C to assist the evaporation of two-dimensional materials. The rear end is a dual-temperature zone tube furnace with precise temperature control and easy operation. Equipped with a mass flow meter gas supply system and a vacuum system, it can accurately react the gas pressure and gas flow in the cavity, which is very practical and repeatable for growing two-dimensional materials such as MoS 2 .
TL1200 tube furnace
Rated temperature: 800 ° C
Maximum temperature: 1000 ℃
Fastest heating rate: ≤30 ℃ / min
Recommended heating rate: ≤15 ℃ / min
Temperature control method: intelligent 30-segment programmable control
Working voltage: AC220V
Rated power: 1.2KW
Temperature control accuracy: ± 1 ℃
Heating element: resistance wire
Quartz tube: 60/80/100/150 * 1000mm (pipe diameter is optional)
Put a furnace plug on each side. The furnace plug can block the heat radiation in the center of the furnace tube. It must be placed in the correct position of the furnace before heating.
Overall Ruler (LXDXH)
电阻丝点击进入资料下载 Imported Swedish Canthal A1 resistance wire
Use Yudian program temperature control instrument (standard)
1. 30-segment program temperature control intelligent PID adjustment.
2. With over-temperature protection. The electric furnace heating circuit is automatically cut off when the over-temperature protection or over-temperature protection occurs. (When the electric furnace temperature exceeds 1200 degrees or the thermocouple is blown.
The AC relay on the main circuit will be automatically disconnected, the main circuit is disconnected, the ON light on the panel is off, the OFF light is on, and the electric furnace is limitedly protected.
3. With 485 communication interface (standard with optional software)
4. It has a power failure protection function, that is, when the furnace is powered on after the power is turned off, the program does not start from the initial temperature, but starts from the furnace temperature when the power is turned off.
5.The meter has the function of temperature self-tuning
(Replacement of imported instruments requires additional payment, purchase)
Temperature control mode
Broken Couple Protection and Display
Over temperature protection
+/- 1 ℃
Phase shift trigger
106 / 16E Simmonk, Germany
≤30 ℃ / Min (can be modified according to requirements)
Recommended heating rate
≤15 ℃ / Min
Heating section length
Ambient surface temperature
Valves and flanges
Range and gas
5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10 SLM (you can choose the range above and the type of gas to be arbitrarily)
Flow control accuracy
± 1.0% FS
Maximum working (use) pressure
± 0.5% FS
± 0.2% FS
Number of ways
1, 2, 3, 4, 5, 6, 7, 8 (optionally select several)
Double ferrule stainless steel joint
System working pressure range
0.1 ~ 0.5 MPa
-0.1 ~ 0.15MPa 0.01MPa / div
Static mixing chamber
Dia50 X 400MM
Dia6 / 1/4 "
650X650X600 / 650X650X300
With this system, the vacuum degree of the furnace tube can reach
10 -1 Pa
Vacuum baffle valve
Ultimate partial pressure
5X10 -2 Pa
Intake and exhaust interface
2.2L / S
|power supply||AC100-240 50 / 60HZ|
|Maximum Helium Leak Rate||5 · 10-8 Pa m3 / s|
|Pumping rate||14 m3 / h|
|Inlet and exhaust interface||KF25|
Vacuum measurement range
0.1-10 5 Pa
24V 1A DC (with 220V transformer)
Vacuum gauge interface
Digital display (screen size is 20x14mm), its data display unit is torr
46mm × 28mm × 126mm (L x W x H)
Can detect a variety of gases, including mixed gases, with accurate and repeatable measurements.
3.8x10-5 -1125 Torr.
Unit input voltage
380V / 220V
Vacuum baffle valve
Molecular pump model
Molecular pump inlet flange
Pumping rate of molecular pump L / S (for air)
Molecular pump ultimate pressure (Pa)
6 × 10 -7
Cooling water pressure (MPa)
Cooling water temperature
0 ~ 40 ℃
Recommended starting pressure
KF25 / KF40
Pumping rate of front pump (L / S)
4X10 -2 Pa
Pumping speed of front pump
0.9m 3 / h
Pumping rate (N2)
33L / S
Model of composite vacuum gauge
Vacuum gauge measurement range
10 -5 -10 5 Pa
One year warranty, lifetime technical support
Special tips: 1. Consumable parts such as heating elements, quartz tubes, sample crucibles, etc. are not under warranty
2. Damage caused by the use of corrosive gases and acid gases is not covered by the warranty.
1. The air pressure in the furnace tube cannot be higher than 0.02MPa
2. Due to the high internal pressure of the gas cylinder, when introducing gas into the furnace tube, a pressure reducing valve must be installed on the gas cylinder. In order to ensure safety, it is recommended to use a pressure lower than 0.02 MPa.
3. When the furnace temperature is higher than 1000 ° C, the furnace tube must not be in a vacuum state. The pressure in the furnace tube must be equal to the atmospheric pressure.
4. The gas flow entering the furnace tube needs to be less than 200SCCM to avoid the impact of the cold air flow on the hot furnace tube
5. For the experiment of sample heating, it is not recommended to close the suction valve and inlet valve of the flange end of the furnace tube. If you need to close the gas valve to heat the sample, you must always pay attention to the indication of the pressure gauge. If the pressure is greater than 0.02MPa, you must immediately open the exhaust valve to prevent accidents (such as furnace tube rupture, flange flying out, etc.)
This CVD system has a preheating system, which consists of preheating system + gas supply system + tube furnace + extraction system. The maximum temperature can reach 1200 degrees. The heating zone can be a single temperature zone and the ultimate vacuum can reach 10 -1 Pa The gas supply system is a flow regulator which can be a 4-way proton flow meter.
进口电阻丝瑞典（Canthal） 为加热元件，采用双层壳体结构和宇电控温仪表，能进行30段程序控温，移相触发、可控硅控制，炉膛采用氧化铝多晶纤维材料，具有温场均衡、表面温度低、升降温度速率快、节能等优点，是高校、科研院所、工矿企业做高温气氛烧结、气氛还原、CVD实验、真空退火用的理想产品。 This tube furnace adopts imported resistance wire Sweden (Canthal) as heating element, adopts double-layer shell structure and Yudian temperature control instrument, can carry out 30-segment program temperature control, phase-shift triggering, thyristor control, furnace hearth adopts oxidation Aluminum polycrystalline fiber material has the advantages of balanced temperature field, low surface temperature, fast temperature rise and fall, energy saving, etc., and is an ideal product for high-temperature atmosphere sintering, atmospheric reduction, CVD experiments, and vacuum annealing in universities, research institutes, and industrial and mining enterprises .
6.Stainless steel support frame
TL1200-CVD system comes standard