uedbet体育

Product Categories

VTL1200-PECVD Vertical Single Temperature Zone PECVD System

  • Technical Parameters
  • Detailed Description
  • Video show
  • The standard configuration
  • Option

Detailed technical parameters

VTL1200 vertical tube furnace

model

VTL1200-PECVD-I

VTL1200-PECVD-II

VTL1200-PECVD-III

power

3.5KW

3.5KW

3.5KW

Furnace tube size

Dia 60 (OD) X1200mm

Dia 80 (OD) X1200mm

Dia 100 (OD) X1200mm

voltage

220V

Phase

Simplex

Heating element

电阻丝点击进入资料下载 Imported Swedish Canthal A1 resistance wire

control method

Use Yudian program temperature control instrument (standard)

1. 30-segment program temperature control intelligent PID adjustment.

2. With over-temperature protection and cut-off protection, the electric furnace heating circuit is automatically cut off when the temperature is over-temperature or broken.

The AC relay on the main circuit will be automatically disconnected, the main circuit is disconnected, the ON light on the panel is off, the OFF light is on, and the electric furnace is limitedly protected.

3. With 485 communication interface (standard with optional software)

4. It has a power failure protection function, that is, when the furnace is powered on after the power is turned off, the program does not start from the initial temperature, but starts from the furnace temperature when the power is turned off.

5.The meter has the function of temperature self-tuning

(Replacement of imported instruments requires additional payment, purchase)

       

FP93 temperature control instrument European instrument touch screen instrument

(Japan Island Electric)

Temperature control mode

Smart PID

Broken Couple Protection and Display

Have

Over temperature protection

Have

Overcurrent protection

Have

control precision

+/- 1 ℃

trigger

Phase shift trigger

Electrical appliances

Zhengtai

Thyristor

106 / 16E Simmonk, Germany

Maximum temperature

1200 ℃

Rated temperature

1100 ℃

Heating rate

≤20 ℃ / Min (can be modified according to requirements)

Recommended heating rate

≤10 ℃ / Min

Thermocouple model

K type

Heating section length

200mm

Electrical certification

Ambient surface temperature

≤45 ℃

Furnace plug, material placement

Furnace plug, material placement picture

RF power

(Plasma generator)

Power output range

0-500W

Reflected power

200W

working frequency

Radio frequency: 13.56MHZ ± 0.005%

Power stability

+/- 0.1%

Harmonic component

≤-50dbc

RF area width

0-600mm adjustable

Matching method

automatic

cooling method

Subcool

noise

<50dB

RF interface

50Ω N-type

Input power

208-240V 50 / 60HZ

GX gas supply system main parameters

Mass flowmeter

Range and gas

5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10 SLM (you can choose the range above and the type of gas to be arbitrarily)

Pressure resistance

3MP

Flow control accuracy

± 1.0% FS

Maximum working (use) pressure

0.3MPa

Linear

± 0.5% FS

Repeat accuracy

± 0.2% FS

Number of ways

1, 2, 3, 4, 5, 6, 7, 8 (optionally select several)

Connector type

Double ferrule stainless steel joint

System working pressure range

0.1 ~ 0.5 MPa

Operating temperature

5-45 ℃

Pressure gauge

-0.1 ~ 0.15MPa 0.01MPa / div

Static mixing chamber

Dia50 X 400MM

interface

Dia6 / 1/4 "

VS-0.1 extraction system

Either Option 1 or Option 2

power supply

220V

size

650X650X600 / 650X650X300

Bellows

KF25X1000mm

With this system, the vacuum degree of the furnace tube can reach

10 -1 Pa

Vacuum baffle valve

KF25

VRD-8 Vacuum Pump

(Option One)

model

VRD-8

Ultimate partial pressure

5X10 -2 Pa

Intake and exhaust interface

KF25

Motor speed

1440RPM

Pumping rate

2.2L / S

Motor Power

0.4KW

Preiffer ACP15 Oil-Free Multistage Roots Pump

Option II

model ACP15
power supply AC100-240 50 / 60HZ
power 450W
weight 25KG
Maximum Helium Leak Rate 5 · 10-8 Pa m3 / s
Pumping rate 14 m3 / h
Ultimate pressure 0.02Torr
Inlet and exhaust interface KF25

Resistance vacuum gauge

(Option One)

model

ZDR-1

power

25W

Vacuum measurement range

0.1-10 5 Pa

Resistive Silicon

ZJ-52T

Sweden (INFICON)

Pirani ceramic capacitor vacuum gauge

(Option II)

model

PCG554

Input voltage

24V 1A DC (with 220V transformer)

Vacuum gauge interface

KF16

Digital Display

Digital display (screen size is 20x14mm), its data display unit is torr

Product Size

46mm × 28mm × 126mm (L x W x H)

weight

5 lbs

Detection gas

Can detect a variety of gases, including mixed gases, with accurate and repeatable measurements.

Whether antiseptic

Antiseptic

Response time

≤30ms

Measuring range

3.8x10-5 -1125 Torr.

Molecular pump unit (optional)

(Either plan one or plan two)

Unit input voltage

380V / 220V

Bellows

KF40X1000

Vacuum baffle valve

KF40

Chassis size

600X600X600

Molecular pump

(Option One)

Molecular pump model

FJ620

Input voltage

380V

Molecular pump inlet flange

DN160

Pumping rate of molecular pump L / S (for air)

600

Molecular pump ultimate pressure (Pa)

6 × 10 -7

cooling method

Water cooling

Cooling water pressure (MPa)

0.1-0.2

Cooling water temperature

<25 ℃

Ambient temperature

0 ~ 40 ℃

Recommended Qidong pressure

<100pa

Molecular pump fore vacuum pump TRP-24

(FJ620 molecular pump must be equipped with previous pump)

(Option II)

power

0.75KW

Voltage

380V

Rotating speed

1450rpm

Inlet diameter

KF25 / KF40

Pumping rate of front pump (L / S)

6

Ultimate pressure

4X10 -2 Pa

Germany Pfeiffer Vacuum Pump

(Option II)

Voltage

220V

power

110W

Extraction interface

KF40

weight

150KG

Pumping speed of front pump

0.9m 3 / h

Pumping rate (N2)

33L / S

Composite vacuum gauge

Model of composite vacuum gauge

ZDF

power supply

220V 55W

control precision

± 1%

Vacuum gauge measurement range

10 -5 -10 5 Pa

Warranty

One year warranty, lifetime technical support

Special tips: 1. Consumable parts such as heating elements, quartz tubes, sample crucibles, etc. are not under warranty

2. Damage caused by the use of corrosive gases and acid gases is not covered by the warranty.

Precautions

1. The air pressure in the furnace tube cannot be higher than 0.02MPa

2. Due to the high internal pressure of the gas cylinder, when introducing gas into the furnace tube, a pressure reducing valve must be installed on the gas cylinder. In order to ensure safety, it is recommended to use a pressure lower than 0.02 MPa.

3. When the furnace tube used is corundum tube, when the furnace temperature is higher than 1500 ℃, the furnace tube cannot be in a vacuum state.

4. The gas flow entering the furnace tube needs to be less than 200SCCM to avoid the impact of the cold air flow on the hot furnace tube

5. For the experiment of sample heating, it is not recommended to close the suction valve and inlet valve of the flange end of the furnace tube. If you need to close the gas valve to heat the sample, you must always pay attention to the indication of the pressure gauge. If the pressure is greater than 0.02MPa, you must immediately open the exhaust valve to prevent accidents (such as furnace tube rupture, flange flying out, etc.)

6. Don't use graphite crucibles in alumina tubes

VTL1200-PECVD system consists of VTL1200 vacuum vertical tube furnace, quartz vacuum chamber, RF power supply, GX gas supply system, extraction system, and vacuum measurement system.

main feature:

1. The gas in the quartz vacuum chamber is turned into an ionic state by RF power.

2. PECVD requires lower temperatures than ordinary CVD for chemical vapor deposition.

3. The stress of the deposited film can be controlled by the frequency of the RF power source.

4. PECVD has a higher chemical vapor deposition rate, better uniformity, consistency and stability than ordinary CVD.

和无定型硅 (a-Si:H) 等。 5. Widely used in the growth of various films, such as: SiOx, SiNx, SiOxNy and amorphous silicon (a-Si: H)

This VTL1200-PECVD system uses Swedish Kanthal resistance wire as heating element, adopts double-layer shell structure and 30-segment temperature control instrument, phase-shift triggering and thyristor control. The furnace is made of alumina polycrystalline fiber material. End-effect stainless steel flange seal. Gas nozzles, valves and pressure gauges are installed on the stainless steel flange. The vacuum degree can reach 10 -3 Pa when evacuating. It has temperature field balance, low surface temperature, fast temperature rise and fall, energy saving, and price. Benefits and more.

1.Swedish Kanthal A1 resistance wire

Kanthal A1 raw silk domestic resistance wire hearth VS imported resistance wire hearth

(1), the surface temperature can reach 1420

(2) The surface is stainless steel (very bright, pay attention when customers identify it), will not rust, and will not drop slag even if it is used for a long time.

(3), Kanthal resistance wire data download

(4) Kanthal resistance wire website: www.kanthal.com

(5), resistance balance, temperature field balance is good

Fe-Cr-Al Alloy doped by Mo resistance wire produced by Shougang used by most manufacturers Kanthal A1 resistance wire has uniform resistance and balanced heat generation

Sometimes the resistance is unbalanced, part of the heat is large and part of the heat is small.

2. Installed air switch and leakage protector:

When the circuit is over-current or leakage, the meeting will be disconnected automatically.

3.Can connect with computer

The furnace is equipped with a communication interface and software, which can directly control various parameters of the furnace through a computer, and can observe the PV and SV temperature values on the furnace and the operation of the instrument from the computer. The actual heating curve of the furnace will be drawn by the computer in real time And can save the temperature data at each moment, you can call up at any time

Furnace

1. High-quality high-purity alumina polycrystalline fiber curing furnace formed by vacuum suction filtration.

2. Molded by Japanese technology.

3.The spacing and pitch of the resistance wires in the furnace are all arranged according to the best thermal technology in Japan, and the temperature field is simulated by thermal software.

4. Adopting 4 weeks heating, the temperature field is more balanced

5. Optional UL certified electrical board (all imported electrical appliances that passed UL certification)

6, certification

7, flange

Hinged flange (optional) Flange that can be connected to resistance vacuum gauge and KF25 bellows (optional) Water-cooled flange (optional)

8, full picture

VTL1200-PECVD system comes standard

Description

Quantity

image

VTL1200 tube furnace

1 set

Quartz tube

1

Stainless steel flange

1 set

Stainless steel stove hook

1

Alumina plug

1 pair

High temperature gloves

1 pair

Alumina crucible

1

K-type thermocouple 1

485 conversion interface and software (optional)

1 set

Manual

1 copy

Flange support

1 serving

Gas supply system

1 set
VS-0.1 extraction system 1 set
RF power 1 set

card cover 4
Bellows 1 stick
Vacuum baffle valve 1
Cylinder connector (N represents the number of ways) N
Valve connector 2
Teflon tube (N stands for number of channels) NX5



online service
  • After sales service After sales service
  • Product consultation Product consultation
  • Product consultation Product consultation
support hotline
  • 4008-051-061
Only focus can be professional
Sales Hotline: 4008-051-061
025-83111681
025-83693678
13913006686
15190487889
After sales phone: 15850763891
Technical support: 13611581149
Company Fax: 025-83111571
"Sweep code and pay attention to discounts"
捕鱼大作战---首页_欢迎您 JJ干瞪眼,欢乐干瞪眼,天天干瞪眼,干瞪眼玩法规则 JJ干瞪眼-首页 ope体育 传统足彩_竞彩网