VTL1200-PECVD Vertical Single Temperature Zone PECVD System
Detailed technical parameters
VTL1200 vertical tube furnace
Furnace tube size
Dia 60 (OD) X1200mm
Dia 80 (OD) X1200mm
Dia 100 (OD) X1200mm
电阻丝点击进入资料下载 Imported Swedish Canthal A1 resistance wire
Use Yudian program temperature control instrument (standard)
1. 30-segment program temperature control intelligent PID adjustment.
2. With over-temperature protection and cut-off protection, the electric furnace heating circuit is automatically cut off when the temperature is over-temperature or broken.
The AC relay on the main circuit will be automatically disconnected, the main circuit is disconnected, the ON light on the panel is off, the OFF light is on, and the electric furnace is limitedly protected.
3. With 485 communication interface (standard with optional software)
4. It has a power failure protection function, that is, when the furnace is powered on after the power is turned off, the program does not start from the initial temperature, but starts from the furnace temperature when the power is turned off.
5.The meter has the function of temperature self-tuning
(Replacement of imported instruments requires additional payment, purchase)
Temperature control mode
Broken Couple Protection and Display
Over temperature protection
+/- 1 ℃
Phase shift trigger
106 / 16E Simmonk, Germany
≤20 ℃ / Min (can be modified according to requirements)
Recommended heating rate
≤10 ℃ / Min
Heating section length
Ambient surface temperature
Furnace plug, material placement
Power output range
Radio frequency: 13.56MHZ ± 0.005%
RF area width
208-240V 50 / 60HZ
Range and gas
5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10 SLM (you can choose the range above and the type of gas to be arbitrarily)
Flow control accuracy
± 1.0% FS
Maximum working (use) pressure
± 0.5% FS
± 0.2% FS
Number of ways
1, 2, 3, 4, 5, 6, 7, 8 (optionally select several)
Double ferrule stainless steel joint
System working pressure range
0.1 ~ 0.5 MPa
-0.1 ~ 0.15MPa 0.01MPa / div
Static mixing chamber
Dia50 X 400MM
Dia6 / 1/4 "
650X650X600 / 650X650X300
With this system, the vacuum degree of the furnace tube can reach
10 -1 Pa
Vacuum baffle valve
Ultimate partial pressure
5X10 -2 Pa
Intake and exhaust interface
2.2L / S
|power supply||AC100-240 50 / 60HZ|
|Maximum Helium Leak Rate||5 · 10-8 Pa m3 / s|
|Pumping rate||14 m3 / h|
|Inlet and exhaust interface||KF25|
Vacuum measurement range
0.1-10 5 Pa
24V 1A DC (with 220V transformer)
Vacuum gauge interface
Digital display (screen size is 20x14mm), its data display unit is torr
46mm × 28mm × 126mm (L x W x H)
Can detect a variety of gases, including mixed gases, with accurate and repeatable measurements.
3.8x10-5 -1125 Torr.
Unit input voltage
380V / 220V
Vacuum baffle valve
Molecular pump model
Molecular pump inlet flange
Pumping rate of molecular pump L / S (for air)
Molecular pump ultimate pressure (Pa)
6 × 10 -7
Cooling water pressure (MPa)
Cooling water temperature
0 ~ 40 ℃
Recommended Qidong pressure
KF25 / KF40
Pumping rate of front pump (L / S)
4X10 -2 Pa
Pumping speed of front pump
0.9m 3 / h
Pumping rate (N2)
33L / S
Model of composite vacuum gauge
Vacuum gauge measurement range
10 -5 -10 5 Pa
One year warranty, lifetime technical support
Special tips: 1. Consumable parts such as heating elements, quartz tubes, sample crucibles, etc. are not under warranty
2. Damage caused by the use of corrosive gases and acid gases is not covered by the warranty.
1. The air pressure in the furnace tube cannot be higher than 0.02MPa
2. Due to the high internal pressure of the gas cylinder, when introducing gas into the furnace tube, a pressure reducing valve must be installed on the gas cylinder. In order to ensure safety, it is recommended to use a pressure lower than 0.02 MPa.
3. When the furnace tube used is corundum tube, when the furnace temperature is higher than 1500 ℃, the furnace tube cannot be in a vacuum state.
4. The gas flow entering the furnace tube needs to be less than 200SCCM to avoid the impact of the cold air flow on the hot furnace tube
5. For the experiment of sample heating, it is not recommended to close the suction valve and inlet valve of the flange end of the furnace tube. If you need to close the gas valve to heat the sample, you must always pay attention to the indication of the pressure gauge. If the pressure is greater than 0.02MPa, you must immediately open the exhaust valve to prevent accidents (such as furnace tube rupture, flange flying out, etc.)
6. Don't use graphite crucibles in alumina tubes
VTL1200-PECVD system consists of VTL1200 vacuum vertical tube furnace, quartz vacuum chamber, RF power supply, GX gas supply system, extraction system, and vacuum measurement system.
1. The gas in the quartz vacuum chamber is turned into an ionic state by RF power.
2. PECVD requires lower temperatures than ordinary CVD for chemical vapor deposition.
3. The stress of the deposited film can be controlled by the frequency of the RF power source.
4. PECVD has a higher chemical vapor deposition rate, better uniformity, consistency and stability than ordinary CVD.
和无定型硅 (a-Si:H) 等。 5. Widely used in the growth of various films, such as: SiOx, SiNx, SiOxNy and amorphous silicon (a-Si: H)
This VTL1200-PECVD system uses Swedish Kanthal resistance wire as heating element, adopts double-layer shell structure and 30-segment temperature control instrument, phase-shift triggering and thyristor control. The furnace is made of alumina polycrystalline fiber material. End-effect stainless steel flange seal. Gas nozzles, valves and pressure gauges are installed on the stainless steel flange. The vacuum degree can reach 10 -3 Pa when evacuating. It has temperature field balance, low surface temperature, fast temperature rise and fall, energy saving, and price. Benefits and more.
1.Swedish Kanthal A1 resistance wire
Kanthal A1 raw silk domestic resistance wire hearth VS imported resistance wire hearth
(1), the surface temperature can reach 1420 ℃
(2) The surface is stainless steel (very bright, pay attention when customers identify it), will not rust, and will not drop slag even if it is used for a long time.
(4) Kanthal resistance wire website: www.kanthal.com
(5), resistance balance, temperature field balance is good
Fe-Cr-Al Alloy doped by Mo resistance wire produced by Shougang used by most manufacturers Kanthal A1 resistance wire has uniform resistance and balanced heat generation
Sometimes the resistance is unbalanced, part of the heat is large and part of the heat is small.
2. Installed air switch and leakage protector:
When the circuit is over-current or leakage, the meeting will be disconnected automatically.
3.Can connect with computer
The furnace is equipped with a communication interface and software, which can directly control various parameters of the furnace through a computer, and can observe the PV and SV temperature values on the furnace and the operation of the instrument from the computer. The actual heating curve of the furnace will be drawn by the computer in real time And can save the temperature data at each moment, you can call up at any time
1. High-quality high-purity alumina polycrystalline fiber curing furnace formed by vacuum suction filtration.
2. Molded by Japanese technology.
3.The spacing and pitch of the resistance wires in the furnace are all arranged according to the best thermal technology in Japan, and the temperature field is simulated by thermal software.
4. Adopting 4 weeks heating, the temperature field is more balanced
5. Optional UL certified electrical board (all imported electrical appliances that passed UL certification)
Hinged flange (optional) Flange that can be connected to resistance vacuum gauge and KF25 bellows (optional) Water-cooled flange (optional)
VTL1200-PECVD system comes standard
VTL1200 tube furnace
Stainless steel flange
Stainless steel stove hook
High temperature gloves
485 conversion interface and software (optional)
Gas supply system
|VS-0.1 extraction system||1 set|
|RF power||1 set|
|Vacuum baffle valve||1|
|Cylinder connector (N represents the number of ways)||N|
|Teflon tube (N stands for number of channels)||NX5|