ALD-TL1200-PE Atomic Layer Vapor Deposition System
ALD control panel
1, 5 way temperature control system, can heat the liquid in ALD pipeline and ALD container
2, 2-channel gas pulse alternate control system (alternate time, alternate times, etc., can be controlled by single chip microcomputer or PLC can reach ms)
1.Able to open or close the valve in less than 5 ms
2.Super high cycle life under high-speed execution, the number of cycles in product evaluation is more than 25000000 times
3. Heat-resistant actuator, temperature resistance up to 200 ° C (392 ° F)
ALD chemical vapor deposition is a method (technique) in which different reaction precursors are alternately sent into the reaction chamber in the form of gas pulses and chemically adsorbed and reacted on the deposition substrate to form a deposited film
Source Bottle Features
1. The pipes used are made of 316L stainless steel, and the inside is mechanically and electrochemically polished with 400 mesh, Ra≤0.25μm.
2. The valve adopts American Swagelok ball valve or diaphragm valve.
3. The sealing gasket adopts pure silver nickel-plated gasket.
4. The leak rate of helium mass spectrometry is ≤1.0 * 10 mba L / s.
5. It can contain chemical purity ≥99.9995%.
6. The total residual element content is ≤50PPb.
1, 2 quartz containers connected to the ALD pipeline
2, 2 ALD valves, control 2 pipelines alternate pulse input
3. Multiple heating pipes heat the ALD pipe and the quartz container to ensure that the vaporized liquid enters the reaction area in a vaporized state.
4. Multiple ball valves control the passage of the pipeline.
5. Multiple bypass branches can be used to ventilate other gases or carrier gases.
TL1200 tube furnace
Furnace tube size
Dia 60 (OD) X1800mm
Dia 80 (OD) X1800mm
Dia 100 (OD) X1800mm
Overall Ruler (LXDXH)
Imported Swedish Canthal A1 resistance wire Click to enter the data
Use Yudian program temperature control instrument (standard)
1. 30-segment program temperature control intelligent PID adjustment.
2. With over-temperature protection and cut-off protection, the electric furnace heating circuit is automatically cut off when the temperature is over-temperature or broken.
The AC relay on the main circuit will be automatically disconnected, the main circuit is disconnected, the ON light on the panel is off, the OFF light is on, and the electric furnace is limitedly protected.
3. With 485 communication interface (standard with optional software)
4. It has a power failure protection function, that is, when the furnace is powered on after the power is turned off, the program does not start from the initial temperature, but starts from the furnace temperature when the power is turned off.
5.The meter has the function of temperature self-tuning
(Replacement of imported instruments requires additional payment, purchase)
Temperature control mode
Broken Couple Protection and Display
Over temperature protection
+/- 1 ℃
Phase shift trigger
106 / 16E Simmonk, Germany
≤20 ℃ / Min (can be modified according to requirements)
Recommended heating rate
≤10 ℃ / Min
Heating section length
Ambient surface temperature
Power output range
Radio frequency: 13.56MHZ ± 0.005%
RF area width
208-240V 50 / 60HZ
Range and gas
5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10 SLM (you can choose the range above and the type of gas to be arbitrarily)
Flow control accuracy
± 1.0% FS
Maximum working (use) pressure
± 0.5% FS
± 0.2% FS
Number of ways
1, 2, 3, 4, 5, 6, 7, 8 (optionally select several)
Double ferrule stainless steel joint
System working pressure range
0.1 ~ 0.5 MPa
-0.1 ~ 0.15MPa 0.01MPa / div
Static mixing chamber
Dia50 X 400MM
Dia6 / 1/4 "
650X650X600 / 650X650X300
With this system, the vacuum degree of the furnace tube can reach
Vacuum baffle valve
Ultimate partial pressure
Intake and exhaust interface
2.2L / S
AC100-240 50 / 60HZ
Maximum Helium Leak Rate
5 · 10-8 Pa m3 / s
14 m3 / h
Inlet and exhaust interface
Vacuum measurement range
0.1-10 5 Pa
24V 1A DC (with 220V transformer)
Vacuum gauge interface
Digital display (screen size is 20x14mm), its data display unit is torr
46mm × 28mm × 126mm (L x W x H)
Can detect a variety of gases, including mixed gases, with accurate and repeatable measurements.
3.8x10-5 -1125 Torr.
Unit input voltage
380V / 220V
Vacuum baffle valve
Molecular pump model
Molecular pump inlet flange
Pumping rate of molecular pump L / S (for air)
Molecular pump ultimate pressure (Pa)
6 × 10-7
Cooling water pressure (MPa)
Cooling water temperature
0 ~ 40 ℃
Recommended Qidong pressure
KF25 / KF40
Pumping rate of front pump (L / S)
Pumping speed of front pump
0.9m 3 / h
Pumping rate (N2)
33L / S
Model of composite vacuum gauge
Vacuum gauge measurement range
10-5 -10 5 Pa
ALD-TL1200-1200-SC atomic layer vapor deposition system consists of a sliding tube furnace, quartz vacuum chamber, GX gas supply system, extraction system, vacuum measurement system and ALD system.
以Kanthal A1 电阻丝为加热元件，采用双层壳体结构和30段程序控温仪表，过零触发、可控硅控制，炉膛采用氧化铝多晶纤维材料，炉管两端能不锈钢法兰密封，不锈钢法兰上安装有气嘴、阀门和压力表，抽真空时真空度能够达到10 -3 Pa，具有温场均衡、表面温度低、升降温度速率快、节能、价格优惠等优点。 This ALD-TL1200-1200-SC Atomic Layer Vapor Deposition System uses Kanthal A1 resistance wire as heating element, adopts double-layer shell structure and 30-segment program temperature control instrument, zero-cross trigger, thyristor control, and furnace uses alumina Polycrystalline fiber material, both ends of the furnace tube can be sealed with stainless steel flanges. Gas nozzles, valves and pressure gauges are installed on the stainless steel flanges. The vacuum degree can reach 10 -3 Pa when evacuating. It has a balanced temperature field, low surface temperature, Fast temperature rise and fall, energy saving, price concessions and other advantages.
Cover opening protection system: The furnace is equipped with a travel switch, which will automatically cut off the power when the furnace cover is opened, effectively ensuring the safety of the user.
1.Swedish Kanthal A1 resistance wire
Kanthal A1 Raw Silk Domestic Resistance Wire Furnace Imported Resistance Wire Furnace
(1), the surface temperature can reach 1420 ℃
(2) The surface is stainless steel (very bright, pay attention when customers identify it), will not rust, and will not drop slag even if it is used for a long time.
(4) Kanthal resistance wire website: www.kanthal.com
(5), resistance balance, temperature field balance is good
Fe-Cr-Al Alloy doped by Mo resistance wire produced by Shougang used by most manufacturers Kanthal A1 resistance wire has uniform resistance and balanced heat generation
Sometimes the resistance is unbalanced, part of the heat is large and part of the heat is small.
2. Installed air switch and leakage protector:
When the circuit is over-current or leakage, the meeting will be disconnected automatically.
3.Can connect with computer
The furnace is equipped with a communication interface and software, which can directly control various parameters of the furnace through a computer, and can observe the PV and SV temperature values on the furnace and the operation of the instrument from the computer. The actual heating curve of the furnace will be drawn by the computer in real time And can save the temperature data at each moment, you can call up at any time
1. High-quality high-purity alumina polycrystalline fiber curing furnace formed by vacuum suction filtration.
2. Molded by Japanese technology.
3.The spacing and pitch of the resistance wires in the furnace are all arranged according to the best thermal technology in Japan, and the temperature field is simulated by thermal software.
4. Adopting 4 weeks heating, the temperature field is more balanced
5. Optional UL certified electrical board (all imported electrical appliances that passed UL certification)
Hinged flange (optional) Flange that can be connected to resistance vacuum gauge and KF25 bellows (optional) Water-cooled flange (optional)